Electrode cover, plasma apparatus utilizing the cover, and method of fitting the cover onto the plasma electrode

摘要

A cover for an electrode of a plasma apparatus and the plasma apparatus utilizing the cover. Moreover, a method of fitting the cover onto the electrode. The electrode has a raised central portion surrounded by a sidewall and a peripheral portion. The cover includes a plurality of divided sections. The divided sections are fitted to the peripheral portion of the electrode from the sides. A clearance between the inner wall of the cover and the sidewall of the electrode may be reduced, and the etching of the sidewall of the electrode is suppressed.