Cleaning material and sealing material for microscopic particles

摘要

A cleaning material or a sealing material is attached to a supporting body facing a moving body that contacts microscopic particles. The cleaning material or the sealing material has a ground fabric formed with a knit fabric. The knit fabric is obtained through warp knitting ground yarns. Pile yarns are raised on the ground fabric. The pile yarns slide on the moving body to scrape off the microscopic particles on the moving body, thereby cleaning the surface of the moving body. The pile yarns also blocks flow of microscopic particles through the space between the moving body and the supporting body and collect the particles.