SENSOR ARRANGEMENT, IN PARTICULAR MICRO-MECHANICAL SENSOR ARRANGEMENT

摘要

The invention relates to a sensor arrangement (1), in particular a micro-mechanical sensor arrangement (1) and method for production thereof, comprising a sensor section (2), for delivering determined sensor signals and a cover section (3), arranged on the sensor section (2) to form a hermetically sealed inner sensor chamber (4). An analytical electronic device (30) may be integrated at least partly in the cover section (3) for an analysis of the sensor signals and may be connected electrically to a corresponding circuit device (20) in the sensor section (2).