Vorrichtung zum Verlöten von Kontakten auf Halbleiterchips

摘要

According to the invention, a chip (4), maintained on a chip support (13) by means of a mandrel (1) is heated by a radiation source (12) on the side opposite to the wafer (2) so as to melt an input soldering metal applied on one side opposite to the wafer. A cleaning device (5) comprising a plate (6) provided with a slot (7), a gas channel (8) and a gas evacuation port (14) located proximate to the slot and designed for a forming gas is placed parallel to the wafer. The chip is moved vertically relative to the wafer, compressed on the wafer through the slot and soldered by isothermal solidification.