发明名称 Integrated circuit device and method of manufacturing the same
摘要 The present invention provides an integrated circuit, comprising a semiconductor substrate, an active element formed on the side of one main surface of the semiconductor substrate, an insulating region formed on the side of the main surface of the semiconductor substrate by burying an insulating material in a groove having a depth of at least 20 mum, and a passive element formed directly or indirectly on the insulating region. It is desirable for the passive element to be an inductor.
申请公布号 US2003067052(A1) 申请公布日期 2003.04.10
申请号 US20020298059 申请日期 2002.11.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUO MIE;HAYASAKA NOBUO;MATSUNAGA NORIAKI;OKUMURA KATSUYA
分类号 H01F41/04;H01F17/00;H01L21/822;H01L23/48;H01L23/522;H01L23/64;H01L27/04;H01L27/08;(IPC1-7):H01L29/00 主分类号 H01F41/04
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