Determining electrostatic discharge/latch-up behavior of integrated circuit involves common production of integrated circuit and test structure using same process steps, measuring test structure

摘要

The method involves common production of an integrated circuit and a test structure using the same process steps, measuring electrical parameters on the test structure, driving characteristic values from the measured parameter values that characterize an electrostatic discharge/latch-up characteristic of the integrated circuit and checking whether they are in a define range selected to achieve desired electrostatic discharge/latch-up behavior.