A focal plane array for millimeter wave imaging comprising a three dimensional stack of antenna elements and radiometer microwave monolithic integrated circuits (MMICs) embedded in polymer dielectric layers built on top of a silicon substrate. Each radiometer MMIC and antenna element comprise a radiometer pixel. The silicon substrate contains integrated circuits to collect and process the signals from each radiometer pixel and generate a full-frame video signal. The array can be fabricated on a single silicon wafer or can be constructed from structures fabricated on multiple silicon wafers.
申请公布号
WO03029772(A2)
申请公布日期
2003.04.10
申请号
WO2002US29962
申请日期
2002.09.19
申请人
HRL LABORATORIES, LLC
发明人
POBANZ, CARL, W.;MATLOUBIAN, MEHRAN;BREWER, PETER, D.