METHOD OF PRODUCING BIS (ALKYLCYCLOPENTADIENYL) RUTHENIUM COMPLEX, METHOD OF PURIFYING USED COMPLEX AND METHOD OF REUSING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of synthesizing Ru (RCp)2 in high yield; to pro vide a method of purifying the Ru (RCp)2 after it is used for forming film of the compound through the MOCVD process up to the level same as that before the film layer formation. SOLUTION: This is an improved method of synthesizing bis(alkylcyclopentadienyl)ruthenium complex and comprises the following steps: (a) ruthenium chloride anhydride is allowed to react with sodium ethylcyclopentadiene or sodium isopropylcyclopentadiene together with ruthenium metal in the first solvent; (b) the first solvent is removed, then the reaction mixture is dissolved in the second solution by extraction; (c) the second solvent is removed from the extract and the remaining extract is distilled. In this process, the extract is characteristically allowed to pass through a column filled an adsorbent between the step (b) and the step (c).