发明名称 METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal device, by which provisional firing for forming an alignment layer can be performed in a short time without causing uneven drying with a small amount of gas. SOLUTION: The method for manufacturing the liquid crystal display device includes a process of forming a coating film by coating a liquid containing a resin and a solvent onto a substrate, a process of evaporating the solvent from the coating film by provisional firing the coating film; a process of applying final firing to the coating film after the provisional firing to cure the rein in the coating film, and a process of applying aligning treatment to the coating film after the final firing to obtain the alignment layer. The provisional firing process is characterized in including processes where a substrate 6 is placed in a tunnel type provisional firing furnace 21 and the substrate 6 is heated while forming a gas flow flowing unidirectionally on the coating film along the surface of the coating film by supplying the gas from a first opening to a second opening opposed to each other in the tunnel type provisional firing furnace 21.
申请公布号 JP2003107480(A) 申请公布日期 2003.04.09
申请号 JP20010303414 申请日期 2001.09.28
申请人 TOSHIBA CORP;TOSHIBA ELECTRONIC ENGINEERING CORP 发明人 FURUYA HIROAKI
分类号 G02F1/13;G02F1/1337;(IPC1-7):G02F1/133 主分类号 G02F1/13
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