发明名称 STORAGE CASE OF MASK PROTECTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To evade formation of an air path by which the air flows between an adhesive material layer and a mask when a mask protecting device is adhered to the mask regarding the mask protecting device consisting of a frame, thin film to be extensively provided on one side of the frame and an adhesive tape to be adhered to the other end surface of the frame and to be adhered to the mask for preventing adhesion of foreign matters, etc., to the mask. SOLUTION: In this storage case consisting of a resinous case main body 11 having a platform 12 on which the mask protecting device 3 is mounted and a resinous upper cover to be covered on the main body 11, the rim of the platform 12 on which the mask protecting device 3 is mounted is constituted of rib 13 and deformation of the platform 12 is prevented.</p>
申请公布号 JP2003107679(A) 申请公布日期 2003.04.09
申请号 JP20020273138 申请日期 2002.09.19
申请人 MITSUI CHEMICALS INC 发明人 KONDO MASAHIRO;TSUMOTO TAKAMASA;FUJITA MINORU
分类号 G03F1/66;H01L21/027;(IPC1-7):G03F1/14 主分类号 G03F1/66
代理机构 代理人
主权项
地址