| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle capable of preventing or suppressing infiltration of dust, etc., inside the pellicle, relieving pressure difference inside and outside of the pellicle, capable of replacing gas in the pellicle in a short time and further with excellent light resistance. SOLUTION: A pellicle frame 21 is divided into an inner member 21b and an outer member 21a, the inner member 21b is constituted of self-color anodized aluminum or ceramic with excellent light resistance and an outer member 21a is constituted of aluminum base alloy 7075-T6 with large proof stress. Two air holes 32-27b-30, 20b-27a-34 having three bending parts are provided inside the pellicle frame 21 and an adhesive layer for sucking the dust is provided on the inner surface of the air holes 32-27b-30, 29b-27a-34.</p> |
