Chemically etched microcontact

摘要

A method of fabricating a plurality of micro probes (81) comprising the steps of defining the shapes (72) of a plurality of probes (81) as a mask (73), applying a photoresist (1001) to a surface of a metal foil (1201), overlaying the mask (73) on the metal foil (1201), exposing the photoresist (1001) to light passed through the mask (73), developing the photoresist (1001), removing a portion of the photoresist (1001) to expose a portion (71) of the metal foil (1201), applying an etcher to the surface of the metal foil (1201) to remove the exposed portion to produce a plurality of probes (81), and chemically polishing and plating the plurality of probes (81). <IMAGE>