发明名称 Process for production of ultrathin protective overcoats
摘要 A target of fullerene is placed with a substrate in a vacuum chamber. A charged beam 206, i.e., an electron beam or an ion beam, is directed at the target 208 with a power adequate to emit fullerene molecules from the target and not high enough to form significant amounts of fullerene having a higher molecular structure than the target fullerenes. Fullerene 214 is deposited on the substrate 212. Regardless of the approach used to deposit the fullerenes, the substrate 212 can be heated during deposition to a temperature above the fullerene-to-fullerene disorption temperature to form a coating consisting of an approximate monolayer of fullerene.
申请公布号 GB2380495(A) 申请公布日期 2003.04.09
申请号 GB20020028676 申请日期 2001.05.31
申请人 * SEAGATE TECHNOLOGY LLC 发明人 JOHN W * DYKES;JOEL W * HOEHN;JAMES E * ANGELO;WILLIAM D * MOSLEY
分类号 C01B31/02;C23C14/06;C23C14/30;C23C14/34;C23C14/46;C23C14/58;C30B23/02;C30B33/00;G11B5/255;G11B5/31;G11B5/40;G11B5/72;G11B5/82;G11B5/84;G11B7/12;G11B7/24;G11B7/26;G11B11/105 主分类号 C01B31/02
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