| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser abrasion device that forms a film on a substrate with a uniform thickness and quality by setting optimum film-forming conditions for example in a laser incident angle and a distance between the substrate and a target regardless of the substrate size. SOLUTION: The laser abrasion device is equipped with a substrate holder 30 for holding a substrate 20, a target holder 50 for holding a target 40 in a fashion inclined to the substrate 20, and a laser beam emitting part 60 that emits a laser beam making incident on the target 40 at an incident angleθalong a direction A parallel to the substrate 20. The substrate is rotated in a direction C, while the target 40 is moved so as to make it slidable reciprocatingly in a direction D. The laser beam is scanned in a direction B that crosses at right angle to the laser emitting direction A and that coincides with the turning radius direction E of the substrate.
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