| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an airflow sensor that can accurately measure the temperature, flow velocity, direction, etc., of a fluid flowing along the surface of a substrate. SOLUTION: A plurality of flow sensors 10 is provided on the surface of the substrate 7 so as to detect the flow velocity of a gas 4 flowing through each section on the surface of the substrate 7 and the temperature distribution of the substrate 7 by means of the sensors 10. Each flow sensor 10 is provided with a heating element, two temperature sensors respectively provided on the upstream and downstream sides of the heating element, and an ambient temperature detecting means.</p> |
