发明名称 METHOD FOR MANUFACTURING ARRAY SUBSTRATE
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for manufacturing an array substrate of active elements, which can easily restore dot defects caused by the pattern deficit of a pixel electrode. SOLUTION: In the method for manufacturing the array substrate, a transparent conductive film 10 is formed on a transparent insulation substrate 1 on which a pixel electrode 8 is formed, and a resist pattern 11 having the same pattern as that of the pixel electrode 8 is formed on the transparent conductive film 10. Then, the array substrate is manufactured by performing the patterning of a transparent conductive film 13 having the same pattern as that of the pixel electrode 8 with the resist pattern 13 as a mask, ion-irradiating the transparent conductive film 10 and forming the transparent conductive pattern 13.</p>
申请公布号 JP2003107504(A) 申请公布日期 2003.04.09
申请号 JP20010305655 申请日期 2001.10.01
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 IMADA TATSUO
分类号 G02F1/13;G02F1/1343;G02F1/1362;G09F9/30;H01L21/336;H01L29/786;H01L49/02;(IPC1-7):G02F1/134;G02F1/136 主分类号 G02F1/13
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