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发明名称
Method and apparatus for CVD coating of workpieces
摘要
申请公布号
EP0933445(B1)
申请公布日期
2003.04.09
申请号
EP19990100905
申请日期
1999.01.20
申请人
MTU AERO ENGINES GMBH
发明人
WALTER, HEINRICH
分类号
C23C10/06;C23C16/40;C23C16/44;C23C16/455;(IPC1-7):C23C16/44
主分类号
C23C10/06
代理机构
代理人
主权项
地址
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Fernbedienung
