SENSOR HEAD, LUMINANCE DISTRIBUTION MEASURING DEVICE PROVIDED WITH THE SAME, APPEARANCE INSPECTION DEVICE, AND DEVICE FOR INSPECTING AND EVALUATING DISPLAY UNEVENNESS

摘要

PROBLEM TO BE SOLVED: To obtain a panel image required for inspection at a high speed by forming a configuration of a sensor head having a predetermined length by units, miniaturizing a sensor unit, and arranging a plurality of sensor units. SOLUTION: A plurality of submodules including a linear image sensor having general length are constituted by arranging them in parallel in the direction of length linearly or staggeringly to provide the sensor head having long photographing length. Moreover, a table on which the sensor head and an inspection panel are put is scanned. Photographing data of the sensor head is read into a memory in accordance with the scanning. This image data is reconstituted to measure luminance distribution. Furthermore, a plurality of luminance data images of the same visual field angle as that required for visual inspection are prepared at a high speed and are displayed to conduct appearance inspection. Moreover, image data of different visual field angles are mutually compared to detect structural display unevenness defect generated on a surface of the inspection panel.