发明名称 ACIDIC TREATMENT LIQUID AND METHOD OF TREATING COPPER SURFACES
摘要 The present invention relates to a solution and to a method of treating copper surfaces, the copper surfaces being brought into contact with an acidic treatment liquid which contains hydrogen peroxide and at least one five-membered heterocyclic compound as well as additionally at least one microstructure modifying agent selected from the group comprising thioles A, disulfides B, sulfides C and thioamides D having the following respective general formulae: wherein R<SUP>1 </SUP>and R<SUP>2</SUP>=alkyl, alkenyl, aryl, aralkyl, especially benzyl, cycloalkyl and the derivatives thereof and R<SUP>3</SUP>=R<SUP>1</SUP>, R<SUP>1</SUP>-O, R<SUP>1</SUP>-S, amino or substituted amino, wherein R<SUP>1 </SUP>and R<SUP>2 </SUP>may especially be phenyl or substituted phenyl.
申请公布号 EP1299575(A2) 申请公布日期 2003.04.09
申请号 EP20010965078 申请日期 2001.07.06
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 HAUF, UWE;FUERHAUPTER, HARRY;STIOP, ALEXEY;GRIESER, UDO
分类号 C23C22/52;C23F1/18;H05K3/06;H05K3/28;H05K3/38;(IPC1-7):C23F1/18 主分类号 C23C22/52
代理机构 代理人
主权项
地址