| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid droplet jet patterning apparatus capable of reducing generation of defected goods, executing an ejection examination during a process stopping period in a pattern forming processing step, improving the apparatus operativity, and executing the pattern formation and the ejection examination in upper and lower stages. SOLUTION: A Z axis sliding mechanism 6 is provided for elevation drive of a head 43 including one or a plurality of nozzle heads. The inside of a casing is partitioned into upper and lower two chambers by a partition member 14. An opening is formed in the partition member 14 for allowing passage of the head 43. A pattern processing stage is provided in the lower side space with respect to the partition member 14, and an examination adjustment stage 44 is provided in the upper side space, with appliances for examination and maintenance of the nozzle heads disposed on the examination adjustment stage 44, so that the head 43 is raised to the examination adjustment stage 44 during the process stoppage in a pattern forming processing step for executing an ejection examination, or the like.</p> |
