METHOD AND APPARATUS FOR PRODUCING HYDROFLUORIC ACID

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing hydrofluoric acid able to supply hydrofluoric acid with a desired concentration and quantity on real time and without requiring a large facility. SOLUTION: The method has characteristics to dissolve hydrogen fluoride gas in pure water. The hydrogen fluoride gas recovered and refined from a waste liquor discharged from a semiconductor manufacturing process can be preferably used. Hydrofluoric acid with desired concentration can be preferably produced on its consuming site.