| 摘要 |
PROBLEM TO BE SOLVED: To provide a light receiving element inspection device capable of stable inspection even if the position of light projected to the light receiving element is deviated. SOLUTION: Light emitted from a laser diode 20 is changed into parallel light by a collimator lens 21, and then allowed to enter a fly eye lens 22. When a laser beam from the laser diode 20 passes through the fly eye lens 22, the intensity distribution on the cross section of its optical axis is flattened. The light is converged by a convergent lens 23, and an optional light receiving element 12A in a light receiving element group 12 is irradiated with the light as light having the flat intensity by a galvano-scanner 13.
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