POSITION SENSOR FOR EGR VALVE (EXHAUST GAS RECIRCULATION) WITH ORTHOGONAL TWO MAGNETS AND MAGNETORESISTORS

摘要

The present invention provides an accurate, non-contacting position sensor for an electromagnetic actuator. This position sensor includes a shaft to be detected (1), a first magnet (2) being fixed to the shaft (1) and having a first polarity vector (2a) parallel to an axis of the shaft (1), a second magnet (3) being disposed opposite to the first magnet (2) and having a second polarity vector (3a) crossing the first polarity vector (2a) substantially orthogonally three-dimensionally, and first and second semiconductor magnetoresistive elements (5a, 5b) being disposed over the second magnet (3) and functioning as a magnetoelectric transducer having a magnetosensitive axis substantially orthogonal to the first and second polarity vectors (2a, 3a). The first and second elements (5a,5b) generates an output responsive to an axial movement of the shaft (1).