| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor capable of simplifying the structure of a detection circuit, detecting simply the acceleration in the three-dimensional directions, and measuring other mechanical quantities such as velocity or displacement. SOLUTION: A mass part 1' is supported by a beam part 26 formed by a micro-machining technology so that the mass part 1' is vibrated to a base B by application of the acceleration. A main scale 25 for modulating light from a light source 21 is provided on the mass part 1'. The light source 21, an index scale 22, and a light receiving element array 24 constituted by arraying plural light receiving elements are provided on a substrate 2 arranged fixedly to the base B. |
