OPTICAL ELEMENT HOLDING DEVICE, LENS BARREL, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical element holding device and a lens barrel capable of driving an optical element with high accuracy and efficiently suppressing the transfer of small vibrations to the optical element, an exposure device with high throughput and exposure accuracy, and device manufacturing method for manufacturing a small device with a high yield. SOLUTION: One end of a plate spring 88 is fixed to an inner ring part 44a of the optical element holding device. The other end of the plate spring 88 is brought into sliding contact with a base ring 45 fixed to an outer ring part 44b of the optical element holding part while energized toward the base ring 45 with the energization force of a coil spring 98 attached in spring bearing 68 similarly fixed to the outer ring part 44b. This sliding contact generates frictional force that does not disturb driving force to be transferred from an actuator for moving a movable lens to the inner ring part 44a between the plate spring 88 and the base ring 45.