EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To mitigate effect of non-parallel lights formed by being reflected inside a light control element in an exposure device performing parallel light exposure to a surface to be irradiated of an irradiation object by passing a light from a light source through a Fresnel lens. SOLUTION: In the exposure device performing the parallel light exposure to the surface to be irradiated of the irradiation object 5 by passing the light from the light source 1 through the Fresnel lens 2, the light control element 4 for cutting the non-parallel lights from the Fresnel lens 2 is provided between the surface to be irradiated of the irradiation object 5 and the Fresnel lens 2 and a mechanism for swinging the light control element 4 is provided further. By swinging the light control element 4, the effect of the non-parallel lights reflected inside the element is mitigated and the irradiation surface of the irradiation object is irradiated with the light of a more highly accurate illuminance distribution compared to the case of fixing the light control element.