| 摘要 |
Inspection method and tool for flat panel displays for localizing short-circuit and open-circuit type defects for optional repair involves inducing a localized temperature change in the display and observing any electrical effect on the network formed by the rows and columns. In one embodiment, a laser is used to heat the rows and columns individually and the resulting time-dependent resistance changes or thermoelectric potentials result in electrical signals on the row and column shorting busses. The method can be used to identify crossings of conductors, which contain defects and may be further used to localize the defects within the crossing. Methods for enhancing the sensitivity of the method are also disclosed.
|
