PROCESS AND A DEVICE FOR ERROR CORRECTION IN ACOUSTO-OPTIC DEFLECTION OF LIGHT BEAMS, PARTICULARLY OF LASER LIGHT

摘要

A process and a device for compensating wave-front errors occurring in acousto-optical deflectors, with at least one auxiliary deflection means which produces a deflected beam whose geometry is independent of the deflection angle and which counteracts the dependence of the deflected beam width on the deflection angle (figure 5).