发明名称 |
Method and apparatus for detecting defects along the edge of electronic media |
摘要 |
An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.
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申请公布号 |
US6545752(B1) |
申请公布日期 |
2003.04.08 |
申请号 |
US20010895899 |
申请日期 |
2001.06.29 |
申请人 |
DAITRON, INC. |
发明人 |
SWAN ALAN J.;HAFNER THOMAS J.;HOWELLS JOHN |
分类号 |
G01N21/95;(IPC1-7):G01N21/00;G01R31/26 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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