发明名称 |
METHOD FOR CUTTING NONMETALLIC SUBSTRATE |
摘要 |
<p>PURPOSE: A method for cutting a nonmetallic substrate is provided to improve speed of cutting and quality of cutting surface by optimizing shape and arrangement of an energy source for rapidly heating the nonmetallic substrate. CONSTITUTION: The method for cutting a nonmetallic substrate comprises steps of (i) rapidly heating the cutting path by irradiating first laser beam(210) on a cutting path set on the nonmetallic substrate(1) in an oval shape in which a ratio of major axis (Bl) to minor axis (Bw) is adjusted in the range of 40:1 to 80:1; (ii) forming a groove shaped scribe line(1c) on the surface of the nonmetallic substrate by thermal shock formed by spraying a cooling fluid(310) onto the cutting path; and (iii) cutting the nonmetallic substrate by scanning second laser beam(510) along a scanning path of the first laser beam, wherein the first laser beam is formed in a symmetrical shape centering around the major and minor axes, wherein the first laser beam is formed in a symmetrical shape centering around the major axis while it is formed in an asymmetrical shaped centering around the minor axis, and wherein length (Sw) of the minor axis is 1 to 2 mm while length (Sl) of the major axis is 40 to 80 mm.</p> |
申请公布号 |
KR20030028305(A) |
申请公布日期 |
2003.04.08 |
申请号 |
KR20010061030 |
申请日期 |
2001.09.29 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOO, DAE HO;JUN, BAEK GYUN;KWON, YONG JUN;NAM, HYEONG U |
分类号 |
B28D5/00;B23K26/00;B23K26/06;B23K26/073;B23K26/14;B23K26/40;B23K26/42;C03B33/09;G02F1/1333;H01L21/301;(IPC1-7):B23K26/00 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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