发明名称 |
Coplanarity inspection at the singulation process |
摘要 |
In accordance with the objectives of the invention a new method and apparatus is provide for assuring contact balls coplanarity. The process and apparatus for coplanarity inspection is integrated with the current processing step of BGA device singulation and pick-and-place, thereby eliminating the need for a separate processing step that is typically required for the coplanarity inspection.
|
申请公布号 |
US6543127(B1) |
申请公布日期 |
2003.04.08 |
申请号 |
US20000614011 |
申请日期 |
2000.07.11 |
申请人 |
ST ASSEMBLY TEST SERVICE LTD. |
发明人 |
DIMAANO, JR. ANTONIO B.;AQUIEN WEDDIE PACIO;BRIAR JOHN |
分类号 |
H01L21/00;(IPC1-7):H05K3/30 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|