| 摘要 |
PROBLEM TO BE SOLVED: To provide a washer capable of reusing ozone water once used for delamination, and capable of batch processing with high concentration ozone water, and a washing method using the washer. SOLUTION: The washer comprises at least an ozone dissolving module for carrying out a step of dissolving an ozone gas in water, and a reaction tank for carrying out a step of washing an object with ozone water, wherein the ozone dissolving module contains a gas dissolving film composed of a non- porous film, and the ozone water is circulated between the reaction tank and ozone dissolving module.
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