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发明名称
摘要
申请公布号	JP2003513445(A)	申请公布日期	2003.04.08
申请号	JP20010534193	申请日期	2000.10.16
申请人		发明人
分类号	H01L21/8247;H01L21/28;H01L21/316;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824	主分类号	H01L21/8247
代理机构		代理人
主权项
地址

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