| 发明名称 |
Scanning probe microscope with probe integrated in an optical system |
| 摘要 |
An illumination device for a light microscope comprises a scanning microscope probe which is integrated in the center thereof. A scanning probe microscope comprising such illumination device is also disclosed.
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| 申请公布号 |
US6545263(B2) |
申请公布日期 |
2003.04.08 |
| 申请号 |
US19980187631 |
申请日期 |
1998.11.06 |
| 申请人 |
CARL ZEISS JENA GMBH |
发明人 |
LANGE RALPH;ANTRACK TORSTEN;VOELCKER MARTIN |
| 分类号 |
G01Q60/18;(IPC1-7):H01J3/14;G02B21/06 |
主分类号 |
G01Q60/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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