| 发明名称 |
Stable electrical contact for silicon carbide devices |
| 摘要 |
An electrical contact for a silicon carbide component comprises a material that is in thermodynamic equilibrium with silicon carbide. The electrical contact is typically formed of Ti3SiC2 that is deposited on the silicon carbide component.
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| 申请公布号 |
US6544674(B2) |
申请公布日期 |
2003.04.08 |
| 申请号 |
US20010940064 |
申请日期 |
2001.08.27 |
| 申请人 |
BOSTON MICROSYSTEMS, INC. |
发明人 |
TULLER HARRY L.;SPEARS MARLENE A.;MICAK RICHARD |
| 分类号 |
H01L21/04;H01L29/24;H01L29/45;H01L29/47;(IPC1-7):H01R3/00;H01L21/00;B32B9/00 |
主分类号 |
H01L21/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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