发明名称 |
DIAMOND COATING DRESSER |
摘要 |
PROBLEM TO BE SOLVED: To provide a dresser preventing pollution due to loosening and elution of abrasive grains. SOLUTION: A plurality of protruding parts 12 are provided on a surface 11 of a substrate 10. A whole of the surface 11 of the substrate 10 is coated by a first coating layer 15 comprising one type of component from carbide, nitride, carbonitride or silicon. A whole surface of the first coating layer 15 is coated by a second coating layer 16 comprising vapor phase synthesized diamond. Layer thickness t of the second coating layer comprising the vapor phase synthesized diamond is set in a range of 0.5-20 μm. |
申请公布号 |
JP2003103464(A) |
申请公布日期 |
2003.04.08 |
申请号 |
JP20010302737 |
申请日期 |
2001.09.28 |
申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
MASUNO SATOYUKI;MATSUKI RYUICHI;MORITA KEISUKE |
分类号 |
B24B53/12;A47J37/06;B24B53/017;B24B53/02;B24D3/00;F24C15/20;H01L21/304 |
主分类号 |
B24B53/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|