发明名称 DIAMOND COATING DRESSER
摘要 PROBLEM TO BE SOLVED: To provide a dresser preventing pollution due to loosening and elution of abrasive grains. SOLUTION: A plurality of protruding parts 12 are provided on a surface 11 of a substrate 10. A whole of the surface 11 of the substrate 10 is coated by a first coating layer 15 comprising one type of component from carbide, nitride, carbonitride or silicon. A whole surface of the first coating layer 15 is coated by a second coating layer 16 comprising vapor phase synthesized diamond. Layer thickness t of the second coating layer comprising the vapor phase synthesized diamond is set in a range of 0.5-20 μm.
申请公布号 JP2003103464(A) 申请公布日期 2003.04.08
申请号 JP20010302737 申请日期 2001.09.28
申请人 MITSUBISHI MATERIALS CORP 发明人 MASUNO SATOYUKI;MATSUKI RYUICHI;MORITA KEISUKE
分类号 B24B53/12;A47J37/06;B24B53/017;B24B53/02;B24D3/00;F24C15/20;H01L21/304 主分类号 B24B53/12
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