INKING APPARATUS FOR SEMICONDUCTOR FABRICATION

摘要

PURPOSE: An inking apparatus for semiconductor fabrication is provided to reduce a time for controlling a position of an inker by inserting an end portion of an inker driving shaft into a reception portion of a jig of an inker mounting ring. CONSTITUTION: An inker(110) includes a reservoir(113), an exhaust tube(115), and an exhaust nozzle(117). The reservoir(113) is used for storing ink. The exhaust tube(115) is installed at an end portion of the reservoir(113). The exhaust tube(115) is used for exhausting the ink. The exhaust nozzle(117) is used for exhausting the ink from of the inside of the exhaust tube(115). The inker(110) is connected with an inker driving shaft(130). An end portion of the inker driving shaft(130) is fixed to an inker mounting ring(170) by a jig(145) mounted at the inker mounting ring(170). The exhaust nozzle(117) is shifted by a solenoid(119). The ink is exhausted by the movement of the exhaust nozzle(117). An inferior chip is marked by using the ink.