发明名称 Method of manufacturing a semiconductor device with multiple emitter contact plugs
摘要 A semiconductor device, such as a BiCMOS, includes a bipolar transistor having at least an emitter region. An emitter electrode is formed on the emitter region. Further, a wiring pattern is formed over the emitter region. A plurality of contact plugs are formed to electrically connect the emitter electrode with the wiring pattern. The contact plugs are partially embedded in the emitter electrode in order to prevent of reduction of the current amplification factor of the bipolar transistor.
申请公布号 US6544830(B2) 申请公布日期 2003.04.08
申请号 US20020134482 申请日期 2002.04.30
申请人 NEC CORPORATION 发明人 YOKOYAMA HIROAKI
分类号 H01L21/768;H01L21/8249;H01L23/485;H01L29/417;(IPC1-7):H01L21/824 主分类号 H01L21/768
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