| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of decreasing the viscosity of a coating liquid at the time of applying the coating liquid to a plate face of a substrate and spraying the coating liquid without dripping. SOLUTION: In the coating apparatus provided with an ink jet type head 11, the head comprises a head main body 12 in which liquid chamber 13 for storing a coating liquid is formed by partitioning, a flexible plate 17 installed so as to seal the liquid chamber, a nozzle plate 18 installed in the head main body and in which a nozzle 19 communicated with the liquid chamber is formed, a heater installed in the head main body and capable of heating the coating liquid stored in the liquid chamber, and the second piezoelectric element 20 fixed in the face of the flexible plate on the opposite to the liquid chamber so as to vibrate the flexible plate and spraying the coating liquid stored in the liquid chamber.
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