WAFER BOAT OF DIFFUSION FURNACE

摘要

PURPOSE: A wafer boat of a diffusion furnace is provided to reduce a fabricating cost and prevent contamination due to particles by forming a dummy wafer and a boat with the same material. CONSTITUTION: A boat is vertically installed at a diffusion furnace. A main body of the boat is formed with a plurality of vertical beams(11). Circular plates(13,15) are formed at an upper portion and a bottom portion of the vertical beams(11), respectively. The vertical beams(11) are fixed by the circular plates(13,15). A plurality of slots are formed on the vertical beams(11). Wafers are inserted into the slots of the vertical beams(11). A plurality of dummy wafers(27) are inserted into a predetermined part(29) of an upper portion and a predetermined part(31) of a lower portion. The dummy wafers(27) are formed with quartz.