VARIABLE OPTICAL ATTENUATOR COMPRISING WAVEGUIDE AND MEMS ACTUATOR

摘要

PURPOSE: A variable light attenuator comprising a waveguide and a MEMS(Microelectromechanical System) actuator is provided, which mitigates high control accuracy of an optical shutter and is not affected by surrounding temperature variation. CONSTITUTION: An input port waveguide(130) has a structure where its width increases gradually along a propagation path of a light to extend a width of a light beam incident through an input port optical fiber. An output port waveguide(140) is arranged by being separated from the input port waveguide, and has a structure where its width decreases gradually along the propagation path of the light beam to concentrate the light having extended width toward the output port optical fiber. An optical shutter(160) is arranged between the input port waveguide and the output port waveguide and attenuates an intensity of the light variably. A MEMS actuator(170) moves the optical shutter. And a control device controls the MEMS actuator.