发明名称 |
Synthetic quartz glass for optical member, process for producing the same, and method of using the same |
摘要 |
A process for producing a synthetic quartz glass for an optical member, which comprises a step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet light having a wavelength of 180 nm or shorter to improve the transmittance in a region of wavelengths of not longer than 165 nm.
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申请公布号 |
US6544914(B1) |
申请公布日期 |
2003.04.08 |
申请号 |
US20000701191 |
申请日期 |
2000.12.28 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
KIKUGAWA SHINYA;IKUTA YOSHIAKI;MASUI AKIO;SHIMODAIRA NORIAKI;YOSHIZAWA SHUHEI |
分类号 |
B08B7/00;C03B19/14;C03C3/06;C03C23/00;(IPC1-7):C03C3/06 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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