METHOD FOR GENERATING LARGE AREA PLASMA FILTERING MACRO-PARTICLE USING CUSP MAGNETIC FIELD

摘要

PURPOSE: A method for generating large area plasma filtering macro-particle using a cusp magnetic field is provided, which increases a transportation efficiency by making plasma filtered in a reactor. CONSTITUTION: According to the method, macro-particles are removed in a reaction chamber(306) by forming a cusp magnetic field in a plasma source exit in a processing chamber using a permanent magnet or an electromagnet(303). In order to increase processing uniformity, an AC current of the electromagnet is used.