| 摘要 |
PURPOSE: A dual actuator structure of a cantilever and a method for fabricating the same are provided to increase displacement and to improve a linear characteristic of an article by forming actuators on and under a membrane, respectively. CONSTITUTION: A cantilever(100) includes a cantilever membrane(102), a first actuator(104), a second actuator(106) and a probe tip. The first actuator(104) has a first lower electrode(104a), a first deformation layer(104b), and a first upper electrode(104c), which is sequentially deposited on the cantilever membrane(102). The second actuator(106) has a second lower electrode(106a), a second deformation layer(106b), and a second upper electrode(106c), which are sequentially deposited under the cantilever membrane(102). The probe tip is formed at an end of the cantilever membrane(102).
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