SEAL DEVICE, PROCESSING DEVICE USING SEAL DEVICE, AND MICRO FLOW RATE CONTROL DEVICE

摘要

PURPOSE: To provide a seal device preventing liquid from leaking to a wall body side when sealing a shaft body inserted through the wall body by the liquid. CONSTITUTION: This seal device is provided with a housing 29 formed with an insertion hole 28 of which one end surface is airtightly joined with the outer surface of the wall body and into which the end part of a carrier roller 5 penetrating through a through hole 8 formed in the wall body is inserted, a gas feed passage 42 feeding gas to a first space part 51 between the outer circumferential surface of a shaft body in one end surface side of the housing and the internal circumferential surface of the insertion hole, a liquid feed passage 43 feeding the liquid to a space part between the outer circumferential surface of the shaft body in the other end surface side of the housing and the internal circumferential surface of the insertion hole, and first to third seal members 38-40 provided in the first and the second space parts, sealing a part positioned in the space part of the shaft body by the liquid fed from the liquid feed means, and allowing the gas fed from the gas feed means to pass to one end surface side of the housing.