| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric drive device capable of an efficient driving with a single DC power source in the piezoelectric element drive device for also impressing a voltage in a reverse direction to the piezoelectric element, and also to provide a diaphragm pump, capable of increasing a suction amount and enhancing a compression ratio with the device. SOLUTION: A piezoelectric element 1, to which voltage in positive polarization direction is impressed is connected in parallel with a capacitor C0, with switching elements S3 and S6 being turned on, and moves electric charges to the capacitor C0 until a voltage of the piezoelectric element 1 and that of the capacitor C0 are balanced. Then, the capacitor C0 is connected, in parallel with the piezoelectric element 1 so as to impress to the piezoelectric element 1 a voltage in a direction opposite to the positive polarization direction, with a switching element S4 and switching element S5 being turned on. |
