DIELECTRICS TARGET FOR OPTICAL DISK AND METHOD FOR FORMING FILM

摘要

PROBLEM TO BE SOLVED: To provide a ZnS series dielectric target for spattering having a low target resistance, and a film forming method and manufacturing equipment for forming a dielectric film for an amorphous phase change optical disk by using the target. SOLUTION: The target is dispersed with 5-30 mol% of ZnO blended with 0-5 mol% of Al2 O3 for ZnS series dielectric material. The dielectric material is ZnS itself or ZnS dispersed with 5 mol% or less of In2 O3 , SnO2 , or ITO (In2 O3 +SnO2 ). The dielectric film for amorphous phase change optical disk is formed on the substrate by a spattering method by using a film forming device equipped with a spattering power source constituted so as to superimpose and impress frequencies of 50-400 KHz to the target.