| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device having no rise in electric resistance, high efficiency and a long service life by manufacturing an aluminum having no crystal grain boundary at least within a range of an electrode finger serving as an excitation electrode of a surface acoustic wave. SOLUTION: In the surface acoustic wave device in which electrodes are formed on a piezoelectric single crystal substrate and a manufacturing method therefor, the substrate is made of a tantalic acid lithium or a niobic acid lithium, the substrate material is cut so that a face including an X axis perpendicular to a Y axis is formed into a surface by turning the Y axis by 33 deg.±9 deg. centered at the X axis, and the electrodes are made of a laminated film having at least a titanium nitride layer and an aluminum layer successively on the substrate. |
