| 摘要 |
PROBLEM TO BE SOLVED: To set a semiconductor light-receiving element which is arranged on a substrate in such a manner that a light-receiving surface is almost in parallel to the light-propagating direction of an optical waveguide, for receiving the propagating light effectively. SOLUTION: The light propagates on the optical waveguide 16 which is provided with clad parts 13, 15 formed on the substrate 11 and a core part 14 in the clad parts 13, 15. This connection structure located between the optical waveguide 16 and the semiconductor light-receiving element 12 is used for detecting the propagating light by using the semiconductor light-receiving element 12 which is arranged in the vicinity of the core part 14 on the substrate 11. In the structure, the semiconductor light- receiving element 12 is installed on an installation part whose surface is formed almost flat in shape by burying an electrode wiring 18 for installing the element 12 in an upper surface of the substrate 11, so that the element 12 is not largely bent. As a result, the increase of a dark current which is caused by stresses corresponding to the bending, generation of cracks in the element 12, and generation of peeling, wrinkles and cracks on a wiring of element 12 can be restrained, and the propagating light can be received effectively. |
