SUBSTRATE TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment system in which a substrate can be inspected in a short time. SOLUTION: The substrate treatment system comprises a section where a unit performing a specified treatment of a substrate is disposed, and an indexer ID. The indexer ID is equipped with a transfer robot TF for mounting a carrier capable of containing a plurality of substrates and delivering a not yet treated substrate in the carrier C to the section where the unit is disposed and containing a treated substrate received therefrom in the carrier C. Since an inspection unit 10 is disposed in the carriable region of the transfer robot TF on the side part of the indexer ID, the substrate can be inspected in a short time. Even if the inspection unit 10 is disposed to project from the substrate treatment system, clean air can be supplied from an air supply section 90 to the inspection unit 10 and thereby the substrate can be inspected in a clean atmosphere.